Getting clean in physique and mind, wearing Rudraksha mala by neck and Bhasma on forehead, One should keep on reciting Siva Panchakshari, viz. ‘Om Namaha Sivaya’ and perform worship as prescribed in the Scriptures.
The service of bilva puja, ‘abhisheka’( Vedic bath of milk, coconut water and finallyof ash or bhasma and so on along with ‘Naivedya’ are an integral part of the worship. More specifically, each service be designated by addressing the Lord as follows:
Om Namah Sivaya- Prokshana (sprinkling of water) on various Puja materials;
Om Namah Rudraya-Kshetra Suddhi (Purification of surroundings);
Om Namah Nilagreevaya-Panchamrita prokshanam (sprinkling of mixture of milk, curd, sugar, honey, fruit);
Om Mahesaya Namah-Asanam ( Seating); Om Paramesvaraya Namah- ‘Nyasam’or identification of self with by Paramesvara by offering the entirety to Him;
Om namah Visvarupaya-Padyam or water for cleaning His feet; recitation of Rudra
Gayatri [ Om Bhur Bhuvah Svaha Om Tatpurushaya Vidmahe Maha Devaya Dheemahi Tanno Rudrah prachodayaat];
Om Ghrishnaya Namah- Uttareeyam ( clothing);
Om Parthaya Namah-Bilva Patra Puja; Om Kapardineya Namah-Dhupam ( incense sticks);
Om Jyeshthaya Namah-Dadhyanna or curd rice Naivedyam;
Om Rudraya Namah- Phalam or fruits; Om Vrajaya Namah- ‘Sakalam’ or every thing;
Om Hiranya Garbhaya Namah- Dakshina or Present to the Pandit performing the worship;
Om Devasya Namah- ‘Abhishekam’;
Om Sambho namah- ‘Neerajanam’ or Aarathi;
Om Parama Sivaya Namah-‘ Sashtanga Namaskara’ and offerings of Siva Mudras].
Keeping in mind the Five Faced Bhagavan with the names of Sadyojata, Vamadeva, Aghora, Tatpurusha and Esana, one concludes the worship by reciting: Bhavaya, Bhavanasakaya, Mahadevaya, Dhimahi, Ugraya, Ugranasaya, Sarvaaya, Sashi Mouliney!
(Shiva Purana)
Om Namah Sivaya.